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Dataset assetOpen Source CommunitySemiconductor ManufacturingLithography Technology
LMLitho
The LMLitho dataset contains partial lithography process data; each tar.gz file includes a source, a mask, and the corresponding resist. There are six types of sources, seven types of masks, and all resists are generated by commercial simulation tools.
Source
github
Created
Nov 19, 2024
Updated
Nov 19, 2024
Signals
211 views
Availability
Linked source ready
Overview
Dataset description and usage context
Dataset Overview
Dataset Name
Partial lithography data of our submission "Keep High Fidelity and Generalization: A Large Model‑Powered Lithography Simulator" on DAC25.
Dataset Contents
- Each tar.gz file contains a source (source), a mask (mask), and the corresponding resist (resist).
- The source (source) has six types.
- The mask (mask) has seven types.
- All resists are simulated using commercial tools.
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