DATASET
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LMLitho
The LMLitho dataset contains partial lithography process data; each tar.gz file includes a source, a mask, and the corresponding resist. There are six types of sources, seven types of masks, and all resists are generated by commercial simulation tools.
Updated 11/19/2024
github
Description
Dataset Overview
Dataset Name
Partial lithography data of our submission "Keep High Fidelity and Generalization: A Large Model‑Powered Lithography Simulator" on DAC25.
Dataset Contents
- Each tar.gz file contains a source (source), a mask (mask), and the corresponding resist (resist).
- The source (source) has six types.
- The mask (mask) has seven types.
- All resists are simulated using commercial tools.
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Topics
Semiconductor Manufacturing
Lithography Technology
Source
Organization: github
Created: 11/19/2024
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